- 설비사양
| Description | General specification |
|---|---|
| Temp. Range | 20℃ ~ 25℃ |
| Temp. Stability | ±0.05℃ |
| Temp. Uniformity | ±0.1℃ |
| Humi. Range | 30% ~ 50% RH |
| Humi. Distribution | ±2% |
| Air Volume | ~Max 300CMM |
| Cooling Type | 수냉식 / 공냉식 |
| Applied Sample | LCD / OLED / Semiconductor / PCB 등 |